A study on the real-time decomposition monitoring of a metal organic precursor for metal organic chemical vapor deposition processes

Ju-Young Yun, Soo Won Heo, Sang-Woo Kang, Jeong-Gil Na,Young-Jae Park, Yong-Hyeon Shin, Ji-Hoon Lee, Tae-Sung Kim, and Doo-Kyung Moon*

Measurement Science and Technology  

Publication Date : 2008.08.17